Plasma chemical conversion of sulphur hexafluoride initiated by a pulsed electron beam

This paper presents the results of the experimental investigation of plasma chemical conversion of sulphur hexafluoride initiated by a pulsed electron beam (TEA-500 pulsed electron accelerator) with the following characteristics: 400-450 keV electron energy, 60 ns pulse duration, up to 200 J pulse energy, and 5 cm beam diameter. Experiments were conducted on the effect of the pulsed electron beam on SF6 and on mixtures of SF6 with O2, Ar, or N2. For the mixture of SF6 and oxygen, the results indicated chemical reactions involving the formation of a number of products of which one is sulphur, confirming the Wray - Fluorescence Analysis. The plasma chemical conversion of SF6 initiated by the pulsed electron beam was not detected when SF6 was mixed with Ar or N2, suggesting a possible mechanism for the reaction of SF6 in the presence of O2.