| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9700780 | Sensors and Actuators B: Chemical | 2005 | 6 Pages |
Abstract
Supersonic cluster beam deposition (SCBD) is used for fabrication of microsensors based on nanostructured titania layers. With a simple one-step post-deposition thermal treatment it is possible to modify the structural and electrical properties of the sensitive layers. Morphological, structural, and electrical characterisations are shown. The obtained sensors have very good performances in term of dynamic response to the exposure to methanol.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
E. Barborini, G. Bongiorno, A. Forleo, L. Francioso, P. Milani, I.N. Kholmanov, P. Piseri, P. Siciliano, A.M. Taurino, S. Vinati,