| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9700793 | Sensors and Actuators B: Chemical | 2005 | 5 Pages |
Abstract
Measurements with a Kelvin probe for testing the sensitive properties of the films and with complete assembled GasFET were performed. The SnO2 thick films activated with Pd show a high sensitivity to CO, hence concentrations lower than 1Â vpm can be detected. The sensor response decreases with increasing temperature. A high cross sensitivity to oxygen and humidity is found only for very low oxygen concentrations (â¼0Â vol.%) or low humidity (â¼0% r.h.). Thick films of SnO2 show a similar behavior to changes in the gas atmosphere in measurements performed using the Kelvin probe and with completely assembled GasFET sensors.
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Physical Sciences and Engineering
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Authors
U. Lampe, E. Simon, R. Pohle, M. Fleischer, H. Meixner, H.-P. Frerichs, M. Lehmann, G. Kiss,