| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9700798 | Sensors and Actuators B: Chemical | 2005 | 5 Pages |
Abstract
A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30-70% RH). Aging and NO2 interference on the sensor performance have been also investigated.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
G. Di Francia, A. Castaldo, E. Massera, I. Nasti, L. Quercia, I. Rea,