| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9700803 | Sensors and Actuators B: Chemical | 2005 | 5 Pages |
Abstract
The fabrication process of multiple sensing devices on a single Al2O3 substrate will be studied step by step aiming to identify the most critical ones to obtain devices with better performances. Steps analysis have been performed by DLS, optical microscopy, two- and four-point probe measurements, and finally testing the device responses towards VOCs.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
L. Quercia, F. Loffredo, M. Bombace I. Nasti, G. Di Francia,