Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9700811 | Sensors and Actuators B: Chemical | 2005 | 6 Pages |
Abstract
This work demonstrates the relevance of a Love-wave device dedicated to the detection of low concentrations of anhydride hexafluorhydric (HF) (CHFÂ <Â 3Â ppm). Improvements are demonstrated compared to previous versions of the detection system for which surface transverse wave (STW) devices were used. We also have tested a coating, specifically sensitive to HF, deposited atop a STW resonator, operating along the same Love-wave principle and exhibiting improved sensitivity compared to STW sensors. Time-life and sensitivity of each device are reported and discussed. Finally, a surface analysis has been performed to try and explain the actual effect of HF on the sensor surface.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
V. Blondeau-Patissier, S. Ballandras, G. Lengaigne, W. Daniau, G. Martin, P. Blind, D. Hauden, M.H. Nadal,