| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9700841 | Sensors and Actuators B: Chemical | 2005 | 7 Pages |
Abstract
“Non-glass” pH-sensitive capacitive EIS (electrolyte-insulator-semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films.
Keywords
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Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
M.J. Schöning, D. Brinkmann, D. Rolka, C. Demuth, A. Poghossian,