Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9700914 | Sensors and Actuators B: Chemical | 2005 | 6 Pages |
Abstract
Thin films of undoped and 0.1Â wt.% Ca-doped SnO2 with 30-60Â Ã
Pt layers deposited by ion beam sputtering have been structured on Si substrates. CH4 sensitivities for those Pt-covered undoped and Ca-doped SnO2 sensors are compared in terms of root-mean-square surface roughnesses measured by the scanning probe microscopy in the AFM mode. There is an optimal Pt thickness of 45Â Ã
for maximum CH4 sensitivity. Pt catalysts lead to increase in methane sensitivity for the undoped sensor. However, coating of a Pt catalyst layer on the Ca-doped SnO2 results in an inverse effect on CH4 sensitivity. All the fabricated sensors exhibited relatively small humidity dependencies and excellent long-term stabilities for 90 days.
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Physical Sciences and Engineering
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Analytical Chemistry
Authors
Bong-Ki Min, Soon-Don Choi,