Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9700939 | Sensors and Actuators B: Chemical | 2005 | 7 Pages |
Abstract
Silicon bridge type micro-gas sensor array was fabricated for detecting hydrogen sulfide (H2S) and ethanol (C2H5OH) gases simultaneously. Anisotropic wet etching of silicon in 25 wt.% KOH solution at 80 °C and silicon reactive ion etching (RIE) were applied to achieve the bridge type sensor for low power consumption. The fabricated device size and active region are 2 mmà2 mm and 85 μmà75 μm, respectively. SnO2-CuO and SnO2-Pt thin films were deposited on bridge type micro-heater in a simple way. The sensing characteristics of the packaged micro-sensor to target gases were also investigated.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Byeong-Ui Moon, Jeong-Min Lee, Chang-Hyun Shim, Myoung-Bok Lee, Jong-Hyun Lee, Duk-Dong Lee, Jong-Ho Lee,