| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9700975 | Sensors and Actuators B: Chemical | 2005 | 6 Pages |
Abstract
Recently, we developed a highly sensitive micro-gas sensor on a silicon micro-hot platform, which was operated by a pulse-heating mode. The gas-sensing was resulted from the flash combustion of the volatile organic molecules adsorbed on the catalytic sensing material during a non-heating period. In the present work, Pd-loaded mesoporous silica (Pd/m-SiO2) was used as an adsorption/combustion-type sensing material. The sensor showed a large response peak to toluene, which was much larger than that of the sensor using Pd/γ-Al2O3 catalyst. Thus, m-SiO2 can increase dramatically the sensitivity of this type of sensor.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
T. Sasahara, A. Kido, H. Ishihara, T. Sunayama, M. Egashira,