| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10327164 | Robotics and Computer-Integrated Manufacturing | 2013 | 8 Pages |
Abstract
⺠We proposed a new noncontact handling gripper called as swirl gripper. ⺠The swirl gripper generates swirling air flow to create an upward lifting force by using a set of swirl vanes. ⺠There exists a levitation zone in which a work piece can maintain a stable levitation. ⺠We verified the practicability by successfully noncontact handling a Φ300 mm silicon wafer with four swirl grippers.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Artificial Intelligence
Authors
Xin Li, Toshiharu Kagawa,