Article ID Journal Published Year Pages File Type
10364839 Microelectronics Journal 2013 7 Pages PDF
Abstract
A new exact formula to determine the substrate resistance and capacitance is presented in this work. It is derived from the solution of the Laplace equations for equivalent problems. It achieves the level of accuracy of standard electromagnetic methods while it is orders of magnitude faster than them. Equations for both rectangular and non-rectangular shapes of interconnect lines which apply to sub-micron technologies are presented. Both data from commercial simulators and measurement data obtained from a fabricated test chip are utilized in order to show the validity of the proposed formula. The results show that the proposed formula succeeds in computing the substrate's resistive and capacitive coupling.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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