| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10365174 | Microelectronics Journal | 2005 | 5 Pages |
Abstract
The nanomechanical characteristics of polycarbonate (PC) polymer were investigated by atomic force microscope (AFM) and nanoindentation. Scratching, wear properties, hardness and Young's modulus were obtained. The relationships between scribing feed and speed, surface depth and roughness and applied load were also investigated. The results indicated that as the applied load was increased, the furrow depth and the surface roughness increased. When the scribing feed was increased, the depth and roughness decreased. Increasing the furrow speed also decreased the surface roughness. The applied load is more significant than the scribing speed on the material removal rate. In addition, the Young's modulus and hardness of the polycarbonate material were 1.8 and 0.2Â GPa, respectively.
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Authors
Te-Hua Fang, Win-Jin Chang, Sung-Lin Tsai,