Article ID Journal Published Year Pages File Type
10365489 Microelectronics Journal 2005 5 Pages PDF
Abstract
An original electrochemical process to prepare SnO2 gas sensors is detailed and correlated to electrical behaviour under gas environment. In particular conditions, Tin material was electrodeposited on insulating substrate to form a thin film principally composed of a single layer of individual nanoaggregates (5-10 nm in size). After tin electrodeposition, these supported aggregates were oxidised at air or pressurized oxygen to induce the formation of a fractal SnO2 film. From these resulting active films, electrical measurements were carried out in ethanol and 300 ppm CO atmospheres. The results show, a sensitivity of 400% at 227 °C in the ethanol case with a response time of 140 s. When the temperature of electrical measurements increases, response and recovery times decrease. However, the sensing amplitude was not modified (Sensitivity around 4) between 250 and 300 °C. In the case of CO, the sensor presented a typical response with a factor of about 2.5 at 250 °C. A fractal dimension between 1.4 and 1.6 is found for fractal-shaped samples allowing an increase of specific surface in contact with gases. However, its does not effect sensitivity, which depends mainly on grain size.
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