| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10365701 | Microelectronics Reliability | 2014 | 17 Pages |
Abstract
To cope with design for manufacturability (DfM), the interval genetic algorithm (IGA) method is introduced for exploring the optimum interval range based on the defined objective error. Finally, the sensitivity analysis is conducted for each significant factor to determine the priority of accuracy control.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Hsin-En Cheng, Rong-Sheng Chen,