Article ID Journal Published Year Pages File Type
10567436 Journal of Power Sources 2011 9 Pages PDF
Abstract
► Gadolinia doped ceria (CGO) thin films deposited by spray pyrolysis and annealed to different degree of crystallinity. ► Microstructure and electrical conductivity very resistant against typical etching used in microfabrication. ► The more crystalline the thin films, the more resistant the films. ► Conductivity of 95% crystalline CGO thin films not changed due to etching.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Preview
The impact of etching during microfabrication on the microstructure and the electrical conductivity of gadolinia-doped ceria thin films
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