Use of golden samples for the assessment of the quality and reproducibility of scanning acoustic microscopy images of electronics samples

In the present study we introduce specifically manufactured golden samples with single or stacked dice including known defects for assessing the image quality and reproducibility of SAM images. These golden samples represent a robust measurement standard. They are particularly suited for studying and then minimizing differences in SAM image quality obtained by different operators and/or different types of SAM measurement equipment. Ultimately, they will allow to homogenize the SAM image quality on different kinds of typical standard samples on a high level, and thus contribute to reliable failure identification independently of the specific operator or measurement system.