Six-DOF micro-manipulator based on compliant parallel mechanism with integrated force sensor

This paper describes the design of a micro-scale manipulator based on a six-DOF compliant parallel mechanism (CPM), which is featured by piezo-driven actuators and integrated force sensor capable of delivering six-DOF motions with high precision and providing real-time force information for feedback control. Particularly, the position and screw-based Jacobian analyses of the CPM are presented. Then, the compliance model and the workspace evaluation of the CPM are proposed in order to account for the compliance and obtain design guidelines. Finally, the integrated sensor is introduced. The static features of such a mechanism include high positioning accuracy, structural compactness and smooth and continuous displacements.