| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 4971517 | Microelectronics Reliability | 2017 | 4 Pages |
Abstract
SM effect and anneal effect will both appear after baking. SM effect plays a main role at low baking temperature. Anneal effect acts a dominant role at high baking temperature.106
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
XiangFu Zhao, Wei Ting Kary Chien,