Article ID Journal Published Year Pages File Type
4971521 Microelectronics Reliability 2017 4 Pages PDF
Abstract
These measurements allow the effect of annealing and the thermal cycle on the inductance value as well as the resistance value to be determined. The inductance value depicts nearly no temperature dependence while the resistance value remains invariable when annealing up to 150 °C and increases for higher temperatures due to copper oxidation and the modification of the interface and volume properties of the copper. On the other hand, in the thermal cycle, the resistance value increases with increasing temperature and then decreases in the cooling phase to regain its initial value (R = R0). The resistance evolution is due to copper resistivity evolution depending on temperature. The inductors remain functional in a high temperature environment without any deterioration.
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Physical Sciences and Engineering Computer Science Hardware and Architecture
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