| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 510408 | Computers & Structures | 2007 | 8 Pages |
Abstract
The BGK model of the Boltzmann equation is applied to the analysis of damping in silicon inertial MEMS working at low-moderate frequencies. Assuming small perturbations, the linearized steady-state 2D equation is implemented in a deterministic manner in order to avoid noise intrinsic in statistical approaches. Implementation details are discussed and the comparison with available experimental data in terms of forces exerted on the suspended shuttle is presented.
Related Topics
Physical Sciences and Engineering
Computer Science
Computer Science Applications
Authors
A. Frangi, A. Frezzotti, S. Lorenzani,