Computation of 3D MEMS electrostatics using a nearly exact BEM solver

The electrostatic properties of thin plate shaped structures relevant to the micro-electro-mechanical systems (MEMS) have been computed using a nearly exact boundary element method (BEM) solver. The solver uses closed form expressions for three-dimensional potential and force fields due to uniform sources/sinks distributed on finite flat surfaces. The expressions have been validated and, being analytical, have been found to be applicable throughout the physical domain. The solver has been applied to compute accurately and efficiently the charge densities on thin plate shaped conductors as used in MEMS components. We have presented results for the model problem of parallel plate capacitors and compared them with results obtained from several other BEM based solvers.