Article ID Journal Published Year Pages File Type
542145 Microelectronics Journal 2009 5 Pages PDF
Abstract

Crystalline tungsten disulphide nanoparticles were successfully synthesized by the chemical vapor condensation (CVC) method. The process performed as decomposition of tungsten hexacarbonyl over sulphur vapor in inert gas flow, where WS2 nanoparticles were synthesized by direct reaction between as formed pure tungsten nanoclusters and sulphur vapor. Influence of experimental parameters on shape, size distribution, structure and phase composition of nanoparticles were evaluated by transmission and scanning electron microscopy and X-ray diffraction analysis. The produced nanoparticles have closely spherical shape with the mean size in the range 20–70 nm in diameter dependently of process parameters. Nested “onion-like” structure of nanoparticles was observed. The mean value of interlayer distance in the {0 0 0 1} direction, is about 0.6358±0.031 nm. Due to nanodimensional size, physical properties and layered structure tungsten disulphide nanoparticles have great potential as a solid lubricant material.

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