| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 542250 | Microelectronics Journal | 2008 | 6 Pages |
The gas-sensing properties of titanium oxide (TiO2)-doped zinc oxide (ZnO) thick film sensor specimens to typical ethanol vapor under UV light activation at room temperature have been investigated. Zinc nanoparticles were mixed with commercial TiO2 in various weight percentage (0%, 1%, 5%, and 10%) and sintered at 650 °C for 2 h to prepare the thick film sensors. The sensors exhibit better photosensitivity and gas sensitivity to ethanol analyte. The response and recovery times are within 8 s. TiO2 doping can improve the sensors stability and reproducibility. X-ray diffraction (XRD) and scanning electron microscopy (SEM) characterization of the film materials revealed that Zn2TiO4 and TiO2 phases hindered the rod- or needle-like structure growth and subsequently affected the gas sensitivity. UV absorption spectra of the sensing film material completely dispersed in ethanol solution exhibited that the red shifts were caused with the doping of a small amount of TiO2 into ZnO then blue shift was caused with higher TiO2 level. The results of the UV spectra are well consistent with the photosensitive performance. The maximum sensitivity can be achieved by doping the amount of TiO2 (5 wt%).
