| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 542279 | Microelectronics Journal | 2007 | 4 Pages |
Abstract
Fluorine-doped tin oxide films were deposited by electrostatic spray pyrolysis technique (ESP), on 1 cm×1 cm Corning 7059 substrates. The structural and electrical properties of the deposited films with different doping levels are studied. Relative variations in the structural properties were explained on the basis of structural factor calculations. The results show that the incorporation of fluorine atoms took place only at substitutional sites leading to an increase in free carrier concentration.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
D. Zaouk, R. al Asmar, J. Podlecki, Y. Zaatar, A. Khoury, A. Foucaran,