Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
542356 | Microelectronics Journal | 2009 | 6 Pages |
Abstract
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using scanning Joule expansion microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using scanning thermal microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements. The performances of the three methods are compared.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Stéphane Grauby, Luis-David Patino Lopez, Amine Salhi, Etienne Puyoo, Jean-Michel Rampnoux, Wilfrid Claeys, Stefan Dilhaire,