Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
542537 | Microelectronics Journal | 2008 | 6 Pages |
Abstract
This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry–Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Yan Sun, Ganhua Feng, George Georgiou, Edip Niver, Karen Noe, Ken Chin,