Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
542723 | Microelectronics Journal | 2006 | 5 Pages |
Abstract
Based on Microelectromechanical systems (MEMS) technique and thick photoresist lithography technology, a new toroidal-type inductor for high temperature application has been successfully developed. In the fabrication process, heat-resistant materials are used, alumina as insulator and supporting materials instead of polyimide, heat resistant glass for underlay instead of normal glass, and copper for coil. The maximum inductance is 87 nH at 0.826 GHz and maximum of quality factor (Q-factor) is 4.63 at 0.786 GHz, at room temperature. With simulation of thermal deformation, it shows that the developed toroidal inductor can be suitable for high temperature application, from 300 to 700 °C.
Related Topics
Physical Sciences and Engineering
Computer Science
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Authors
Chong Lei, Yong Zhou, Xiao-Yu Gao, Wen Ding, Ying Cao, Zhi-Min Zhou, Hyung Choi,