Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
544166 | Microelectronics Journal | 2006 | 5 Pages |
Abstract
Technological applications in opto-electronic devices have increased the interest in characterizing porous silicon structure patterns. Due to its physical properties, solutions from KPZ 2D are adopted to simulate the structure of porous material interface whose spatial characteristics are equivalent to those found in porous silicon samples. The analysis of the simulated and real Scanning Force Microscopy (SFM) surfaces was done using the Gradient Pattern Analysis (GPA). We found that the KPZ 2D model presented asymmetry levels compatible with the irregular surfaces observed by means of SFM images of π-Si.
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Hardware and Architecture
Authors
M.P.M.A. Baroni, R.R. Rosa, A. Ferreira da Silva, I. Pepe, L.S. Roman, F.M. Ramos, R. Ahuja, C. Persson, E. Veje,