Compact MOS-triggered SCR with faster turn-on speed for ESD protection

The merged and compact MOS-triggered SCR devices have been compared and investigated in a 0.13 μm CMOS process. From experimental results, the turn-on time of compact MOS-triggered SCR has been improved from ∼7.2 ns of merged MOS-triggered SCR to ∼4 ns. Compared to merged MOS-triggered SCR devices, the compact MOS-triggered SCR devices can achieve a lower trigger voltage, a faster turn-on speed, a lower on-resistance, a lower clamping voltage and a higher failure current.