| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 545210 | Microelectronics Reliability | 2010 | 5 Pages |
Abstract
The optimal parameters of electron beam induced carbon deposition (EBICD) using hydrocarbon contamination were studied as a function of electron beam energy and scanning time to avoid the mixing or damage layer formation at the interface of the electron beam assisted Pt protection layer and the sample surface by dual beam focused ion beam (DB FIB) for cross sectional transmission electron microscopy (XTEM) analysis. The optimal condition of EBICD was determined. The thickness of EBICD layer increases with electron beam scanning time and amount of hydrocarbon contamination on the sample surface. EBICD using hydrocarbon contamination successfully provides a carbon protection layer for XTEM analysis.
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Authors
J.S. Luo, C.S. Sung, W.S. Hsu, L.Y. Huang, J.D. Russell,