Article ID Journal Published Year Pages File Type
545445 Microelectronics Reliability 2010 4 Pages PDF
Abstract

Moisture effect on the dielectric behavior and structure of BaTiO3-based devices were studied systematically. The dielectric measurement mainly concerned the capacitance and loss of specimen as a function of frequency and temperature between −10 and 50 °C in different measuring environments (vacuum, ambient air with and without dryer). A broad peak of capacitance and loss due to the moisture absorption, depending on frequency and temperature rate and corresponding to a dynamic process involving water absorption and de-absorption, was observed in the heating run when the measurement was carried out in ambient air without dryer. It showed that water absorption would change the apparent dielectric properties of devices and a heat treatment at 50 °C for the BaTiO3-based devices was suggested to reduce the moisture absorption effect.

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Physical Sciences and Engineering Computer Science Hardware and Architecture
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