| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 545739 | Microelectronics Reliability | 2008 | 7 Pages |
Abstract
It should be a key for failure analysis accuracy and efficiency on Back End Of the Line test structures.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
A. Reverdy, M. de la Bardonnie, P. Poirier, H. Murray, P. Perdu, A. Boukkali,