Article ID Journal Published Year Pages File Type
545791 Microelectronics Reliability 2008 4 Pages PDF
Abstract

In this report, the effective gate tab size on pMOSFET to reduce HEIP degradation was investigated. As a result, the effects of tab size of STI edge have been studied and we could propose a design guide taking into account both reliability and process margin as a part of the design for reliability (DFR).

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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