| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 545800 | Microelectronics Reliability | 2008 | 5 Pages |
Abstract
Temperature stability of a piezoresistive 1.5 μm thin SOI resonator at 74 MHz is presented. As compared to capacitive resonators the self-heating due to the bias current causes a further decrease of the resonator frequency, in addition to the well-known dependency on ambient temperature. The interpretation of the resonance frequency as a device temperature is not obvious anymore under self-heating due to the inhomogeneous temperature distribution.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
S. Bendida, J.J. Koning, J.J.M. Bontemps, J.T.M. van Beek, D. Wu, M.A.J. van Gils, S. Nath,