| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 545823 | Microelectronics Reliability | 2008 | 4 Pages |
Abstract
This study compares two different methods of scanning capacitance microscopy (SCM). The first and approved one operates in contact mode and the second novel one in intermittent-contact (IC) mode. Measurements were performed on several samples and the results are compared. New technical expertises on the novel intermittent-contact method are shown and in conclusion assets and drawbacks of this SCM method are emphasized.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Roland Biberger, Guenther Benstetter, Thomas Schweinboeck, Peter Breitschopf, Holger Goebel,