| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 545842 | Microelectronics Reliability | 2008 | 4 Pages |
Abstract
We developed a dedicated measurement set-up for the electrical and electrothermal characterization of semiconductor devices and microsystems under very high-temperature conditions. The set-up consists of several modules comprising a vacuum system as basic unit and a number of alternative sample stages. Currently it enables measurements in the temperature range between room temperature and about 700 °C. We give a detailed description of the measurement system, sample mounting techniques, and exemplary measurements on SiC devices.
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Authors
Peter Borthen, Gerhard Wachutka,