Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
545969 | Microelectronics Reliability | 2007 | 4 Pages |
Abstract
Germanium MOS transistors with high-k gates are good alternatives for the replacement of SiO2 in order to improve the performance of modern devices. Especially rare-earth oxides on germanium deposited by molecular beam deposition (MBD) have shown improved electrical properties compared to previous used HfO2 with a germanium oxynitride (GeON) interfacial layer. In this work we report on the influence of ex situ post-annealing treatment with forming gas on the electrical characteristics of LaAlO3/Al2O3/nGe and CeO2/nGe MIS capacitors. We have observed an improvement of the electrical characteristics after forming gas anneal (FGA) for LaAlO3/Al2O3/nGe in contrast to CeO2/nGe which shows no clear trend regarding the influence of FGA.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
S.F. Galata, E.K. Evangelou, Y. Panayiotatos, A. Sotiropoulos, A. Dimoulas,