| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 546086 | Microelectronics Reliability | 2006 | 9 Pages |
Abstract
Porous silicon based micro-machined peizoresistive pressure sensors are fabricated and tested in the range of 0–1 bar and temperature range of 25–80 °C. The dependence of pressure sensitivity on the variation of ambient temperature is investigated. An intelligent online temperature compensation scheme using ANN technique has been described. The proposed scheme leads to an error reduction of approximately 98% from temperature uncompensated value. A hardware implementation of the proposed scheme using micro-controller is also described.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
C. Pramanik, T. Islam, H. Saha,