High power reliability aspects on RF MEMS varactor design

A new kind of RF MEMS switched varactor for high power RF signals (Pinput > 1W) has been developed on a simple and innovative design. This device is conceived to perform tuneable capacitor operations up to 10 GHz, in the 0-10W power range. The design principle is discussed in detail and measurement results validating our approach are reported. The fabricated components have undergone both lifetime reliability tests and maximum handled power tests. The measurement campaign has shown 1 billion cycle operations under 1W at 10 GHz, 250 million cycle operations under 5W at 3GHz at 2.5 kHz bipolar actuation, without any failure observed, and a maximum power handling capability up to 10W.