Article ID Journal Published Year Pages File Type
546316 Microelectronics Journal 2011 6 Pages PDF
Abstract

The impact of sample-to-sample variability on total ionizing dose (TID) response within-wafer for a 180-nm CMOS technology has been studied. Large variations in leakage current and threshold voltage shift after irradiation are observed. These variations are mainly contributed to the process variability. The process steps which cause TID response variation are preliminarily discussed.

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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