Article ID Journal Published Year Pages File Type
546458 Microelectronics Journal 2008 5 Pages PDF
Abstract

Structures with vertically correlated self-organised InAs quantum dots (QDs) in a GaAs matrix were grown by the low-pressure metal–organic vapour phase epitaxy (MOVPE) and characterised by different microscopic techniques. Photoluminescence in combination with photomodulated reflectance spectroscopy were applied for characterisation of QDs structures. We show that combination of both methods allows detecting optical transitions originating both from QDs and wetting (separation) layers, which can be than compared with those obtained from numerical simulations. On the basis of obtained results, we demonstrate that photoreflectance spectroscopy is an excellent tool for characterisation of QDs structures wetting layers and for identification of spacer thicknesses in vertically stacked QDs structures.

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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