Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
546660 | Microelectronics Journal | 2007 | 8 Pages |
Abstract
This paper describes the principles, design, fabrication and performance of a new type of electromagnetic bistable MEMS relay. The microdevice is operated by a wiggling microactuator, which is symmetrically assembled with two integrated planar windings and one permanent rotor in the form of sandwich with coaxial sustained gaps between each other. The micromachined rotor moves to-and-fro around the axis and operates the joined brush to open or close external circuit. This hybrid MEMS relay has been provided with fast response and latching function owing to the special design. The response time is about 0.3 ms and the maximum load current is 2 A.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Shi Fu, Guifu Ding, Hong Wang, Zhuoqing Yang, Jianzhi Feng,