| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 546764 | Microelectronics Journal | 2006 | 7 Pages |
Abstract
In this work, a new method was developed to increase the stiffness of Polydimethylsiloxane (PDMS) masters using oxide-coated silicon plates, aimed at reducing the residual and deflecting deformations of the PDMS masters for proper pattern transfer. Using this method, these two types of deformations in the reinforced PDMS master have been reduced.
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Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Cheng Luo, Fang Meng, Xinchuan Liu, Yiyun Guo,