Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
546772 | Microelectronics Journal | 2006 | 7 Pages |
Abstract
Atom lithography is one of the latest proposals for high-resolution printing. The mask design and generation is key step for implementation of this method. In this paper, we have theoretically investigated and proposed a new method for two-dimensional optical mask design in atom lithography. A new method for realization of our proposed technique based on guided modes will present. With our proposed idea one can easily print every kind of two-dimensional patterns. This method can lead us to produce the nano-scale electronic and optical devices and systems. Also, a suitable algorithm for mask generation is proposed.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
A. Rostami, A. Rahmani,