Article ID Journal Published Year Pages File Type
547199 Microelectronics Journal 2014 6 Pages PDF
Abstract

This work examines the difficulties associated with using optical techniques to measure temperature when the device itself emits a significant level of light over a wide spectrum, making it a challenge to separate the useful measurement signature from the device light emission. The specific situation considered here is that of using a thermoreflectance (TR) thermography approach to characterize the thermal behavior of semiconductor laser devices. A lowpass filter was placed in the optical path to minimize the primary laser irradiation on the TR imaging and then the TR response of the region of interest was determined over a wide range of visible light wavelengths to locate the maximum response. TR measurements performed at the optimal light wavelength successfully provided a submicron-resolution temperature map of the active area of sample lasers.

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Physical Sciences and Engineering Computer Science Hardware and Architecture
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