Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
547557 | Microelectronics Reliability | 2007 | 4 Pages |
Abstract
Conventional localization techniques such as photoemission microscopy (EMMI) or liquid crystal thermography (LCT) sometimes fail when applied to power semiconductor devices. Thermally induced voltage alteration (TIVA) is a good supplement to overcome difficulties which arise from high voltage (HV) in case of LCT. Missing transparency of the sample/missing photoemission are typical problems occurring during EMMI performed at power devices. In this paper case studies will be shown using a newly developed HV setup for TIVA which point out these advantages.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
M. Reissner,