MEMS inclinometer based on a novel piezoresistor structure

The design, fabrication and test of a novel MEMS inclinometer were described. This inclinometer was based on the piezoresistive detection method, and was fabricated by SOI process. The micro-structure of the inclinometer was a four vertical cantilever beams, a center mass with a rigid cylinder fixed on it. The piezoresistors fabricated on the beams were used to detect the deformation of the cantilevers caused by the gravity. A test system was designed in this paper, from the test results we found that this inclinometer had a sensitivity of 0.025 mV/°, and the test results and the theoretical results are in well agreement, the standard deviation is 0.43874.