Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
547962 | Microelectronics Journal | 2008 | 6 Pages |
Abstract
This paper presents a brief review of our recent work investigating a novel bottom-up approach to realize silicon-based nanoelectronics. We discuss fabrication technique, electronic properties, and device applications of silicon nanodots as a building block for various nanoscale silicon devices.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Hiroshi Mizuta, Shunri Oda,