Comparative analysis of RF LDMOS capacitance reliability under accelerated ageing tests

This paper presents the results of comparative reliability study of C–V characteristics through three accelerated ageing tests for stress applied to an RF LDMOS: Thermal shock tests (TST, air–air test), thermal cycling tests (TCT, air–air test) and high temperature storage life (HTSL). The two first tests are carried out with a drain current flowing through the device during stress. The investigation findings of electrical parameter degradations after various ageing tests are discussed. Feedback capacitance (Crs) is reduced by 16% and gate–drain capacitance (Cgd) by 42%. This means that the tracking of these parameters enables to consider the hot carrier injection as the dominant degradation phenomenon. A physical simulation software has been used to confirm qualitatively degradation phenomena.